{"ticker":"ACLS","companyName":"AXCELIS TECHNOLOGIES INC","fiscalYear":2025,"executiveName":"Russell J. Low","executiveTitle":"President and Chief Executive Officer","totalComp":5100394,"salary":608654,"stockAwards":3852701,"nonEquityIncentive":627522,"otherComp":11517,"yoyChangePct":18.79316400481844,"source":{"filingType":"DEF 14A","filingDate":"2026-03-31","filingUrl":"https://www.sec.gov/Archives/edgar/data/1113232/000110465926037356/tm261420-1_def14a.htm"},"lastUpdated":"2026-05-29T07:05:37.308Z"}