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AXCELIS TECHNOLOGIES INC

ACLS · FY2025

ALIGNED

CEO Package

$5.1M

Pay Ratio

—

Russell J. Low

Returns outran pay growth by +42.3 pts

ASML HOLDING NV

ASML · FY2025

ALIGNED

CEO Package

$7.6M

Pay Ratio

—

C.D. Fouquet

Returns outran pay growth by +34.8 pts

ACM Research, Inc.

ACMR · FY2025

ALIGNED

CEO Package

$633K

Pay Ratio

—

David H. Wang

Returns outran pay growth by +157 pts

CEOTotal Compensation — All Companies

ACLS$5.1MASML$7.6MACMR$633K

All values are grant-date fair value as reported in proxy statements.

Key Differences

The fastest way to read this comparison before dropping into the tables.

ASML carries the largest package at $7.6M, about 12.0x ACMR.
ACLS is the most equity-heavy package, while ACMR leans hardest on base salary.

Pay Component Breakdown

Latest CEO package mix by company. This stays on the CEO package even if the chart above is showing Top 5 pay.

ACLS

Russell J. Low

$5.1M

base salary12%
stock awards76%
non-equity incentive compensation12%
other compensation0%

ASML

C.D. Fouquet

$7.6M

base salary16%
stock awards46%
non-equity incentive compensation34%
other compensation1%

ACMR

David H. Wang

$633K

base salary42%
other compensation1%

Quick Comparison

CompanyCEOLatest YearTotal Comp
AXCELIS TECHNOLOGIES INC(ACLS)Russell J. Low2025$5.1M
ASML HOLDING NV(ASML)C.D. Fouquet2025$7.6M
ACM Research, Inc.(ACMR)David H. Wang2025$0.6M

Note: All compensation values shown are grant-date fair value as reported in proxy statements. Direct comparisons should account for differences in company size, industry, and compensation structure.

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