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VEECO INSTRUMENTS INC

VECO · FY2025

ALIGNED

CEO Package

$4.6M

Pay Ratio

William J. Miller

Pay reset -32.6% while TSR improved +20.3 pts

ASML HOLDING NV

ASML · FY2024

MIXED

CEO Package

$5.9M

Pay Ratio

Christophe D. Fouquet

Awaiting a fuller pay-performance history

LAM RESEARCH CORP

LRCX · FY2025

ALIGNED

CEO Package

$28.3M

Pay Ratio

Timothy M. Archer

Pay reset -6.1% while TSR improved +145 pts

CEOTotal Compensation — All Companies

VECO$4.6MASML$5.9MLRCX$28.3M

All values are grant-date fair value as reported in proxy statements.

Key Differences

The fastest way to read this comparison before dropping into the tables.

LRCX carries the largest package at $28.3M, about 6.1x VECO.
ASML reads mixed, while VECO looks aligned.

Pay Component Breakdown

Latest CEO package mix by company. This stays on the CEO package even if the chart above is showing Top 5 pay.

VECO

William J. Miller

$4.6M

base salary15%
stock awards85%
other compensation0%

ASML

Christophe D. Fouquet

$5.9M

base salary18%
stock awards51%
other compensation3%

LRCX

Timothy M. Archer

$28.3M

base salary4%
stock awards85%
non-equity incentive compensation10%
other compensation0%

Quick Comparison

CompanyCEOLatest YearTotal Comp
VEECO INSTRUMENTS INC(VECO)William J. Miller2025$4.6M
ASML HOLDING NV(ASML)Christophe D. Fouquet2024$5.9M
LAM RESEARCH CORP(LRCX)Timothy M. Archer2025$28.3M

Note: All compensation values shown are grant-date fair value as reported in proxy statements. Direct comparisons should account for differences in company size, industry, and compensation structure.

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