Loading
Loading
Axcelis ceo salary
Russell J. Low, President and Chief Executive Officer of AXCELIS TECHNOLOGIES INC (ACLS), received $5,100,394 ($5.1M) in total compensation for FY2025, up 18.8% from the prior year. Stock awards of $3,852,701 were the largest component. Figures come from AXCELIS TECHNOLOGIES INC's DEF 14A filed 31 Mar 2026 (accession 0001104659-26-037356).
Reported total from the latest DEF 14A pay table. Source filing (accession 0001104659-26-037356). These figures come from AXCELIS TECHNOLOGIES INC's DEF 14A filed 31 Mar 2026 (accession 0001104659-26-037356).
| Component | Amount |
|---|---|
| Salary | $608,654 |
| Stock awards | $3,852,701 |
| Cash incentive | $627,522 |
| Other | $11,517 |
| Total | $5,100,394 |
FAQ
See also: ACLS ticker page