William J. Miller received $4.6M in total compensation as CEO of VEECO INSTRUMENTS INC in FY2025. The largest component was $3.9M in stock awards. That’s down 33% from FY2024. Source: SEC DEF 14A.
In fiscal year 2025, William J. Miller, CEO of VEECO INSTRUMENTS INC (VECO), received total compensation of $4.6 million.
William J. Miller's compensation breakdown includes: base salary of $681K, stock awards valued at $3.9 million, and other compensation of $13K.
Compared to fiscal year 2024, William J. Miller's total compensation decreased 33% from $6.9 million to $4.6 million.
VEECO INSTRUMENTS INC's top 5 named executive officers received combined total compensation of $9.6 million in fiscal year 2025.
The named executive officers disclosed in VEECO INSTRUMENTS INC's 2025 proxy statement are:William J. Miller (CEO) with total compensation of $4.6 million, John P. Kiernan (SVP CFO) with total compensation of $1.6 million, Peter Porshnev (SVP Unified) with total compensation of $1.1 million, Susan Wilkerson (SVP Global Sales &) with total compensation of $1.1 million, and Adrian Devasahayam (SVP Product Line) with total compensation of $1.1 million.
William J. Miller, CEO of VEECO INSTRUMENTS INC (VECO), received $4,624,824 in total compensation for FY2025, down 32.6% from the prior year. Stock awards of $3,931,130 were the largest component. Figures come from VEECO INSTRUMENTS INC's DEF 14A 0001104659-26-032085 filed 19 Mar 2026.
Source Filing
Executive Record
William J. Miller
CEO
Reported Pay
$4.6MSummary compensation table total · FY2025
Read the board's pay decision against shareholder returns and current filing context.
VEECO INSTRUMENTS INC (VECO) — Key Facts
Last updated Aug 20, 2026 · DEF 14A filed Mar 19, 2026
| CEO | William J. Miller, CEO |
|---|---|
| Fiscal year | FY2025 |
| Total compensation | $4.6M |
| Base salary | $681K |
| Stock awards | $3.9M |
| Other compensation | $13K |
| Year-over-year change | -33% |
| Source | DEF 14A, 2026-03-19 |
William J. Miller, the CEO of VEECO INSTRUMENTS INC, received total compensation of $4,624,824 in fiscal year 2025. This includes base salary of $680,961 and stock awards valued at $3,931,130. Figures come from VEECO INSTRUMENTS INC's DEF 14A 0001104659-26-032085 filed 19 Mar 2026.
William J. Miller's base salary at VEECO INSTRUMENTS INC is $680,961 per year as of fiscal year 2025. However, total compensation including stock awards, bonuses, and other benefits is $4,624,824. Figures come from VEECO INSTRUMENTS INC's DEF 14A 0001104659-26-032085 filed 19 Mar 2026.
VEECO INSTRUMENTS INC's CEO, William J. Miller, earned $4,624,824 in total compensation for fiscal year 2025. The majority of this compensation comes from stock awards ($3,931,130) rather than base salary ($680,961). Figures come from VEECO INSTRUMENTS INC's DEF 14A 0001104659-26-032085 filed 19 Mar 2026.
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