Russell J. Low Salary and Compensation - AXCELIS TECHNOLOGIES INC CEO Pay 2025

In fiscal year 2025, Russell J. Low, President and Chief Executive Officer of AXCELIS TECHNOLOGIES INC (ACLS), received total compensation of $5.1 million.

Russell J. Low's compensation breakdown includes: base salary of $609K, stock awards valued at $3.9 million, non-equity incentive compensation of $628K, and other compensation of $12K.

Compared to fiscal year 2024, Russell J. Low's total compensation increased 19% from $4.3 million to $5.1 million.

AXCELIS TECHNOLOGIES INC (ACLS) Executive Pay 2025

AXCELIS TECHNOLOGIES INC's top 7 named executive officers received combined total compensation of $12.9 million in fiscal year 2025.

The named executive officers disclosed in AXCELIS TECHNOLOGIES INC's 2025 proxy statement are:Russell J. Low (President and Chief Executive Officer) with total compensation of $5.1 million, James G. Coogan (Executive Vice President and Chief Financial Officer) with total compensation of $2.4 million, Eileen J. Evans (Executive Vice President, HR and Legal, and General Counsel) with total compensation of $1.6 million, Gerald M. Blumenstock (Executive Vice President, Research, Development, and Engineering) with total compensation of $1.3 million, Gregory F. Redinbo (Executive Vice President, Marketing and Applications) with total compensation of $1.3 million, Christopher J. Tatnall (Executive Vice President, Global Customer Operations) with total compensation of $1.3 million, and Executive Officers Serving at December (2025) with total compensation of $124.